• DocumentCode
    2913853
  • Title

    Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

  • fYear
    2001
  • fDate
    25-25 Jan. 2001
  • Abstract
    Presents the front cover and table of contents from the conference proceedings.
  • Keywords
    micromechanical devices; BioMEMS; actuators; device modeling; fabrication; industrial sensors; mechanical sensors; micro-electro-mechanical systems; microcoolers; microfluidics; micropumps; packaging; probes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
  • Conference_Location
    Interlaken, Switzerland
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-5998-4
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2001.906461
  • Filename
    906461
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2913853