• DocumentCode
    2913990
  • Title

    Ultra-precision micro structuring by means of mechanical machining

  • Author

    Kawai, T. ; Sawada, K. ; Takeuchi, Y.

  • Author_Institution
    FANUC Ltd., Oshino, Japan
  • fYear
    2001
  • fDate
    25-25 Jan. 2001
  • Firstpage
    22
  • Lastpage
    25
  • Abstract
    A variety of microstructures with high accuracy were introduced by means of mechanical machining technology, using the authors´ super-nano friction free machine.
  • Keywords
    micromachining; micromechanical devices; nanotechnology; mechanical machining; super-nano friction free machine; ultra-precision microstructuring; Etching; Lithography; Machining; Manufacturing; Mass production; Micromechanical devices; Milling; Optical filters; Servomotors; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
  • Conference_Location
    Interlaken, Switzerland
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-5998-4
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2001.906469
  • Filename
    906469
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2913990