Title :
Parametric Study of C-N Film Deposition by Reactive Laser Ablation
Keywords :
Atomic force microscopy; Atomic measurements; Conductivity; Glass; Laser ablation; Laser theory; Optical films; Parametric study; Substrates; Tin;
Conference_Titel :
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3169-9
DOI :
10.1109/CLEOE.1996.562585
