DocumentCode
2914481
Title
MEMS with thin-film aerogel
Author
Shih-Kang Fan ; Chang-Jin Kim ; Jong-Ah Paik ; Dunn, B. ; Patterson, P.R. ; Wu, M.C.
Author_Institution
Dept. of Mech. & Aerosp. Eng., California Univ., Los Angeles, CA, USA
fYear
2001
fDate
25-25 Jan. 2001
Firstpage
122
Lastpage
125
Abstract
This paper reports the first successful incorporation of aerogel thin films for MEMS fabrication. We developed the photolithography procedures and various surface micromachining methods for highly porous thin films. The development is verified with micro bridges, cantilevers, and membranes made of aerogel thin films, completing the entire procedures for two aerogel thin films, silica and alumina. Also discussed will be the new opportunities that aerogel MEMS bring about.
Keywords
aerogels; alumina; membranes; micromachining; micromechanical devices; photolithography; silicon compounds; thin films; Al/sub 2/O/sub 3/; MEMS fabrication; SiO/sub 2/; aerogel thin film; alumina; cantilever; membrane; microbridge; photolithography; porous material; silica; surface micromachining; Coatings; Etching; Fabrication; Lithography; Mesoporous materials; Micromachining; Micromechanical devices; Optical films; Silicon compounds; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location
Interlaken, Switzerland
ISSN
1084-6999
Print_ISBN
0-7803-5998-4
Type
conf
DOI
10.1109/MEMSYS.2001.906494
Filename
906494
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