Title :
MEMS with thin-film aerogel
Author :
Shih-Kang Fan ; Chang-Jin Kim ; Jong-Ah Paik ; Dunn, B. ; Patterson, P.R. ; Wu, M.C.
Author_Institution :
Dept. of Mech. & Aerosp. Eng., California Univ., Los Angeles, CA, USA
Abstract :
This paper reports the first successful incorporation of aerogel thin films for MEMS fabrication. We developed the photolithography procedures and various surface micromachining methods for highly porous thin films. The development is verified with micro bridges, cantilevers, and membranes made of aerogel thin films, completing the entire procedures for two aerogel thin films, silica and alumina. Also discussed will be the new opportunities that aerogel MEMS bring about.
Keywords :
aerogels; alumina; membranes; micromachining; micromechanical devices; photolithography; silicon compounds; thin films; Al/sub 2/O/sub 3/; MEMS fabrication; SiO/sub 2/; aerogel thin film; alumina; cantilever; membrane; microbridge; photolithography; porous material; silica; surface micromachining; Coatings; Etching; Fabrication; Lithography; Mesoporous materials; Micromachining; Micromechanical devices; Optical films; Silicon compounds; Transistors;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906494
