Title :
Micromachining techniques for liquid crystal polymer
Author :
Xuefeng Wang ; Liang-Hsuan Lu ; Chang Liu
Author_Institution :
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Abstract :
This paper reports newly developed microfabrication techniques for liquid crystal polymer (LCP) for the first time. LCP is a thermal plastic polymer with regularly aligned molecule chains. It exhibits excellent electrical, physical, and chemical properties, which make it suitable for many MEMS applications. The chemical compatibility of LCP with commonly used chemicals is investigated in this work. MEMS fabrication processes such as metallization, plasma bulk etching, and low temperature thermal lamination have been developed. These micromachining techniques are successfully demonstrated by the development of a microfluid channel system composed of LCP/glass assembly.
Keywords :
liquid crystal polymers; metallisation; microfluidics; micromachining; sputter etching; MEMS fabrication; liquid crystal polymer; metallization; microfluidic system; micromachining; plasma etching; thermal lamination; Chemicals; Fabrication; Liquid crystal polymers; Metallization; Micromachining; Micromechanical devices; Plasma applications; Plasma chemistry; Plasma temperature; Plastics;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906495
