DocumentCode
2914545
Title
Fabrication of micro parts using only electrochemical process
Author
Watanabe, N. ; Suda, M. ; Furuta, K. ; Sakuhara, T.
Author_Institution
Seiko Instrum. Inc., Chiba, Japan
fYear
2001
fDate
25-25 Jan. 2001
Firstpage
143
Lastpage
146
Abstract
We have investigated two kinds of electrochemical processes that scan a processing electrode to fabricate metal micro parts. They are, electroforming on the mold made by electrochemical processing, and shape forming by electrochemical processing after electroplating. An electroformed Ni gear with diameter of 600 /spl square/m and thickness of 100 /spl square/m was fabricated by the former method, and a Ni gear with diameter of 1700 /spl square/m and thickness of 30 /spl square/m was fabricated by the latter method.
Keywords
electroforming; electroplating; micromechanical devices; moulding; nickel; Ni; electrochemical process; electroforming; electroplating; fabrication; metal micro-part; molding; nickel gear; Costs; Electrodes; Etching; Fabrication; Gears; Lithography; Nickel; Production; Shape; Synchrotron radiation;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location
Interlaken, Switzerland
ISSN
1084-6999
Print_ISBN
0-7803-5998-4
Type
conf
DOI
10.1109/MEMSYS.2001.906499
Filename
906499
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