Title :
Multi-polymer microstereolithography for hybrid opto-MEMS
Author :
Maruo, S. ; Ikuta, K. ; Ninagawa, T.
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
Abstract :
We have developed a novel microstereolithography method for producing a hybrid structure using multiple photocurable polymers. This method, termed the Multi-polymer IH process, has the potential to provide us with various functional microdevices, such as actuators, sensors and optical devices. The microdevices are produced by combining the diverse properties of different photocurable polymers. To verify the basic performance of our process, several optical waveguides were made with two kinds of photocurable polymers having different refractive indexes. By combining the optical, electrical and mechanical properties of photocurable polymers, this process should advance Polymer MEMS technology and make a substantial contribution to microoptics and microchemical devices for BioMEMS.
Keywords :
micro-optics; micromechanical devices; optical fabrication; optical polymers; optical waveguides; photolithography; refractive index; Multi-polymer IH process; electrical properties; fabrication; hybrid opto-MEMS technology; mechanical properties; micro-optical device; microstereolithography; optical properties; optical waveguide; photocurable polymer; refractive index; Actuators; Biomedical optical imaging; Diversity reception; Mechanical sensors; Optical devices; Optical polymers; Optical refraction; Optical sensors; Optical variables control; Optical waveguides;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906501
