DocumentCode
2914701
Title
Applications of MEMS to industrial inspection
Author
Takeda, M.
Author_Institution
Dept. of Mech. Syst., Mitsubishi Electr. Corp., Hyogo, Japan
fYear
2001
fDate
25-25 Jan. 2001
Firstpage
182
Lastpage
191
Abstract
The applications of MEMS, micromachines or micro robots, to industrial inspections are investigated. Applications are classified by their uses and forms. The necessity of MEMS is also described. Present research activities regarding maintenance area are surveyed, and a chain-type micromachine for the inspection of outer tube surfaces is introduced as an example. There are still a lot of problems for practical use, however, although there are lots of potential uses. Industrial inspection applications are expected to be one of the promising applications of MEMS followed by optical, RF, and power applications.
Keywords
inspection; maintenance engineering; micromechanical devices; microrobots; MEMS; chain-type micromachine; industrial inspection; micro robots; micromachines; outer tube surfaces; Chemical industry; Engines; Inspection; Micromechanical devices; Monitoring; Optical surface waves; Optical switches; Radio frequency; Research and development; Roads;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location
Interlaken, Switzerland
ISSN
1084-6999
Print_ISBN
0-7803-5998-4
Type
conf
DOI
10.1109/MEMSYS.2001.906510
Filename
906510
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