Space and surface charge behavior analysis of plasma pre-processed dielectric thin films

In order to study the space charge behavior in dielectric thin films, a space charge distribution measuring system based on a LIPP (laser induced pressure pulse) method was constructed. Pressure pulse was generated by irradiating the absorbent on a sample surface with mode-locked pico-second YAG laser to achieve good spatial resolution. From a LIPP response of a PVDF (polyvinylidene fluoride) piezoelectric thin film, in-depth profile of the system is estimated. For example, it was estimated to be about 2 μm for PTFE (polytetrafluoro ethylene) thin film. By using space charge density distribution measurement, space and surface charge behavior of the corona-charged PTFE thin film was studied. Effect of antistatic process using low pressure discharge plasma and charge elimination process dipping in city water was also studied. Plasma processing enhances the effect of charge elimination dipping in city water