Optimization of slider contact face geometry for surface acoustic wave motor

Author

Kurosawa, Minoru K. ; Itoh, H. ; Asai, K. ; Takasaki, M. ; Higuchi, T.

Author_Institution

Dept. of Adv. Appl. Electron., Tokyo Inst. of Technol., Yokohama, Japan

fYear

2001

fDate

25-25 Jan. 2001

Firstpage

252

Lastpage

255

Abstract

An extremely large output force surface acoustic wave (SAW) motor is reported. Driving frequency of the SAW device was 9.6 MHz. Sliders were fabricated with silicon surface machining. For the contact surface, the slider had a lot of projections to control elastic contact condition. Twenty five different projection designs were tested. Using a 4/spl times/4 mm/sup 2/ silicon surface micro fabricated slider, the maximum output force was 7.6 N. Namely, it was about 0.5 N/mm/sup 2/ or 50 N/cm/sup 2/. The no-loaded speed of the motor was 0.7 m/sec in the experiment. Estimated mechanical output power of the actuator was 1 W. The mechanical output force and output power are the best of all in MEMS actuators.

Keywords

mechanical contact; micromachining; micromotors; surface acoustic wave devices; ultrasonic motors; 0.7 m/s; 1 W; 9.6 MHz; MEMS actuator; Si; elastic deformation; friction drive; mechanical output power; microfabrication; no-load speed; output force; projection design optimization; silicon surface micromachining; slider contact face; surface acoustic wave motor; Acoustic devices; Acoustic waves; Actuators; Frequency; Geometry; Machining; Power generation; Silicon; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on

Conference_Location

Interlaken, Switzerland

ISSN

1084-6999

Print_ISBN

0-7803-5998-4

Type

conf

DOI

10.1109/MEMSYS.2001.906526

Filename

906526