Device transplant of optical MEMS for out of plane beam steering

Author

Nguyen, H. ; Su, J.G.-D. ; Toshiyoshi, H. ; Wu, M.C.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

fYear

2001

fDate

25-25 Jan. 2001

Firstpage

325

Lastpage

328

Abstract

We report on a substantially improved process for which an array of optical MEMS devices (MOEMS) are batch transferred onto a quartz wafer such that through wafer beam scanning can be achieved. MEMS optical scanners are successfully fabricated, transferred, and actuated for out-of-plane beam steering. DC transfer curves of control devices on silicon and those transferred on quartz exhibit similar pull in voltages of 135 V and 142 V respectively. Similarly, resonance for control device peaked at 1.1 kHz while transferred devices exhibit higher resonance at 1.2 kHz.

Keywords

beam steering; micro-optics; micromachining; micromechanical devices; optical scanners; DC transfer curves; control devices; optical MEMS; optical scanners; out of plane beam steering; pull in voltage; quartz wafer; surface micromachining; through wafer beam scanning; transferred devices; Beam steering; Microelectromechanical devices; Micromechanical devices; Mirrors; Optical arrays; Optical crosstalk; Optical devices; Optical films; Optical microscopy; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on

Conference_Location

Interlaken, Switzerland

ISSN

1084-6999

Print_ISBN

0-7803-5998-4

Type

conf

DOI

10.1109/MEMSYS.2001.906544

Filename

906544