Title :
Ultra-compact encoder using Talbot interference
Author :
Hane, J. ; Komazaki, I. ; Ito, T. ; Kuroda, Y. ; Yamamoto, E.
Author_Institution :
Adv. Technol. Res. Center, Olympus Opt. Co. Ltd., Tokyo, Japan
Abstract :
A newly developed encoder using a vertical cavity surface-emitting laser (VCSEL) is presented. This high-resolution encoder is the smallest in its class and has a large allowance for the gap alignment between the sensor head and the scale. These features are realized simultaneously by adopting VCSEL and multi-functional IC and by incorporating the technique of Talbot interference: no optical elements are required for the sensor head except a light source and a photosensor, which can be reduced in size by the semiconductor production technology. In comparison to our previous model, this encoder has greater tolerance against optical disturbances to the scale such as dust.
Keywords :
angular measurement; integrated optoelectronics; light interferometry; measurement by laser beam; optical sensors; photodiodes; surface emitting lasers; Talbot interference; VCSEL; gap alignment; high-resolution encoder; multi-functional IC; photosensor; ultra-compact encoder; vertical cavity surface-emitting laser; Interference; Light sources; Optical arrays; Optical sensors; Optical signal processing; Optical waveguides; Photodiodes; Photonic integrated circuits; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906546