DocumentCode
2915467
Title
A centrally-clamped parallel-beam bistable MEMS mechanism
Author
Qiu, J. ; Lang, J.H. ; Slocum, A.H.
Author_Institution
MIT, Cambridge, MA, USA
fYear
2001
fDate
25-25 Jan. 2001
Firstpage
353
Lastpage
356
Abstract
This paper presents a monolithic mechanically-bistable mechanism that does not rely on residual stress for its bistability. The bistable mechanism comprises two centrally-clamped parallel beams that have a curved shape but no residual stress after fabrication. Modal analysis and FEA simulation of the beams are used to predict and design the bistable behavior, and they agree well. Micro-scale mechanisms are fabricated by DRIE and their test results agree well with the theoretical and numerical predictions.
Keywords
internal stresses; micromechanical devices; modal analysis; FEA simulation; centrally-clamped parallel-beam bistable MEMS mechanism; curved shape; modal analysis; monolithic mechanically-bistable mechanism; residual stress; Analytical models; Clamps; Energy barrier; Etching; Fabrication; Micromechanical devices; Modal analysis; Predictive models; Residual stresses; Shape;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location
Interlaken, Switzerland
ISSN
1084-6999
Print_ISBN
0-7803-5998-4
Type
conf
DOI
10.1109/MEMSYS.2001.906551
Filename
906551
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