Title :
DEP microactuation of liquids
Author :
Gunji, M. ; Jones, T.B. ; Washizu, M.
Author_Institution :
Dept. of Mech. Eng., Kyoto Univ., Japan
Abstract :
We report rapid actuation of nanoliter to microliter water volumes using the dielectrophoretic (DEP) force. This micro-electromechanical mechanism for manipulating, transporting, and metering liquids harnesses strong, nonuniform RF electric fields created by coplanar electrodes with 30 to 100 /spl mu/m feature size patterned on insulating substrates. Electrolysis is avoided by spin-coating the electrodes with /spl sim/10 /spl mu/m of polyimide. Transient liquid velocities exceed 25 cm/s, and droplets down to a few nanoliters in volume are formed in <30 ms. Because water responds rapidly, controlled DEP actuation can be achieved by very short bursts of rf voltage. An important benefit of minimized exposure of conductive liquids to strong rf fields is reduced Joule heating. A new microfluidic scheme for the "laboratory on a chip" is proposed, based on high-speed, programmable manipulation of discrete nanodroplets on smooth substrates.
Keywords :
drops; electrophoresis; microactuators; microelectrodes; microfluidics; spin coating; 30 to 100 micron; DEP microactuation; Joule heating; conductive liquids; coplanar electrodes; dielectrophoretic force; discrete nanodroplets; feature size; insulating substrates; micro-electromechanical mechanism; nonuniform RF electric fields; polyimide; programmable manipulation; spin-coating; water volumes; Dielectric liquids; Dielectrics and electrical insulation; Dielectrophoresis; Electrochemical processes; Electrodes; Heating; Nonuniform electric fields; Polyimides; Radio frequency; Voltage control;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906557