DocumentCode :
2916515
Title :
CMOS based sensors: From a sample to real products
Author :
Mayer, Felix
Author_Institution :
Sensirion Inc., Zurich
fYear :
2008
fDate :
13-17 Jan. 2008
Firstpage :
1
Lastpage :
5
Abstract :
Sensirion [1] is a high-tech sensor company with headquarters in Switzerland. Based on technological concepts developed in the mid 90 s at ETH Zurich, Sensirion was founded in 1998. Product development started in the same year. Today, Sensirion is a high-tech sensor company, with a highly skilled team of more than 120 employees. About 50% of the manpower is concentrated in R&D. Sensirion successfully manufactures millions of MEMS sensors each year for a wide range of industrial, consumer, medical, and automotive applications. Sensirion is the industry leader for chip based humidity & temperature sensors, mass flow measurement and control devices for gases and liquids, and differential pressure sensors.
Keywords :
CMOS integrated circuits; flow measurement; flow sensors; humidity sensors; microsensors; pressure sensors; temperature sensors; CMOS based sensors; MEMS sensors; Sensirion; Switzerland; automotive application; chip based humidity sensor; chip based temperature sensor; control devices; differential pressure sensor; high-tech sensor company; industrial application; mass flow measurement; product development; Automotive applications; CMOS technology; Fluid flow measurement; Gas industry; Humidity; Industrial control; Manufacturing industries; Micromechanical devices; Product development; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
ISSN :
1084-6999
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2008.4443578
Filename :
4443578
Link To Document :
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