• DocumentCode
    2916661
  • Title

    A Knudsen pump using nanoporous zeolite for atmospheric pressure operation

  • Author

    Gupta, Naveen K. ; Gianchandani, Yogesh B.

  • Author_Institution
    Univ. of Michigan, Ann Arbor
  • fYear
    2008
  • fDate
    13-17 Jan. 2008
  • Firstpage
    38
  • Lastpage
    41
  • Abstract
    This paper describes the use of naturally occurring nanoporous zeolite (clinoptilolite) for a miniature Knudsen pump. Based on the principle of thermal transpiration, these pumps have no moving parts, and are attractive for applications ranging from gas analyzers to cooling systems. The Knudsen pump requires flow channels that are in the free molecular or transitional flow regimes. Consequently, at atmospheric pressure, the pore diameters should be les100 nm, and large numbers of pores are necessary to permit meaningful flow. The initial prototype, operating at ap50 K above room temperature, achieves a flow rate of ap0.12 seem with a small pressure load at the output, or a maximum pressure of ap2.5 kPa when the flow is blocked. Its packaged volume is 55times55times12 mm .
  • Keywords
    atmospheric pressure; micropumps; nanoporous materials; zeolites; Knudsen pump; atmospheric pressure operation; nanoporous zeolite; thermal transpiration; Cooling; Costs; Fabrication; Fluid flow; Helium; Mechanical engineering; Nanoporous materials; Packaging; Prototypes; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
  • Conference_Location
    Tucson, AZ
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-1792-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2008.4443587
  • Filename
    4443587