DocumentCode
2916661
Title
A Knudsen pump using nanoporous zeolite for atmospheric pressure operation
Author
Gupta, Naveen K. ; Gianchandani, Yogesh B.
Author_Institution
Univ. of Michigan, Ann Arbor
fYear
2008
fDate
13-17 Jan. 2008
Firstpage
38
Lastpage
41
Abstract
This paper describes the use of naturally occurring nanoporous zeolite (clinoptilolite) for a miniature Knudsen pump. Based on the principle of thermal transpiration, these pumps have no moving parts, and are attractive for applications ranging from gas analyzers to cooling systems. The Knudsen pump requires flow channels that are in the free molecular or transitional flow regimes. Consequently, at atmospheric pressure, the pore diameters should be les100 nm, and large numbers of pores are necessary to permit meaningful flow. The initial prototype, operating at ap50 K above room temperature, achieves a flow rate of ap0.12 seem with a small pressure load at the output, or a maximum pressure of ap2.5 kPa when the flow is blocked. Its packaged volume is 55times55times12 mm .
Keywords
atmospheric pressure; micropumps; nanoporous materials; zeolites; Knudsen pump; atmospheric pressure operation; nanoporous zeolite; thermal transpiration; Cooling; Costs; Fabrication; Fluid flow; Helium; Mechanical engineering; Nanoporous materials; Packaging; Prototypes; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location
Tucson, AZ
ISSN
1084-6999
Print_ISBN
978-1-4244-1792-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2008.4443587
Filename
4443587
Link To Document