Title :
A review of diamond-like carbon technology
Author_Institution :
Harwell Lab., AEA Technol., Didcot, UK
Abstract :
The current status of diamond-like carbon (DLC) technology and the demonstration of rudimentary devices illustrate the scope for these materials in a number of sensor and actuator applications
Keywords :
carbon; C; actuators; diamond-like carbon technology; review; sensors;
Conference_Titel :
Extremely Hard Materials for Micromechanics (Digest No: 1997/059), IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19970333
