Proofmass-less vibration sensor using the motion of self-charged anion and cation in an electrolyte for ultra-high frequency detection

This paper presents a vibration sensor of the ultra-high frequency mechanical vibration based on the motion of anion and cation in an electrolyte. Electrolyte vibration sensors have the high shock survival characteristics and a simple read-out circuit because of the small mass and their own charges. In the experimental study, electrolyte chamber and detection electrode were fabricated by PDMS and gold, respectively. 5.8 M sodium chloride (NaCl) solution was used as electrolyte in 36nl-chamber. Mechanical vibration was measured from 2 kHz to 4 MHz.