Novel concave-based micro optical components

Author

Hsiao, Sheng-Yi ; Lee, Chih-Chun ; Fang, Weileun

Author_Institution

Nat. Tsing Hua Univ., Hsinchu

fYear

2008

fDate

13-17 Jan. 2008

Firstpage

124

Lastpage

127

Abstract

This research demonstrates three novel concave-based micro optical components. A double-concave (DCV) lens is realized by a simple polymer dispensing and sucking process. The DCV component consists of a high-aspect-ratio lens frame structure and dispensed UV-curable polymer lens. Moreover, this study further employs the process for DCV to implement the concave-mirror and the doublet. The measurements show a typical DCV (made of NOA63 polymer) has negative focal lengths of -1.42 mm (for 632.8 nm red-laser) and -1.17 mm (for 473 nm blue-laser), and a typical concave mirror has a focal-length of 3.28mm. The NOA63/PDMS doublet is also demonstrated.

Keywords

microlenses; mirrors; optical design techniques; optical fabrication; optical polymers; NOA63 polymer; concave mirror; concave-based micro optical components; dispensed UV-curable polymer lens; double-concave lens; high-aspect-ratio lens frame structure; polymer dispensing process; sucking process; Curing; Lenses; Microoptics; Mirrors; Optical devices; Optical imaging; Optical microscopy; Optical polymers; Polymer films; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Conference_Location

Tucson, AZ

ISSN

1084-6999

Print_ISBN

978-1-4244-1792-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2008.4443608

Filename

4443608