Title :
Dual-chirality helical nanobelts: A novel linear-to-rotary motion converter
Author :
Dong, L.X. ; Zhang, L. ; Kratochvil, B.E. ; Shou, K.Y. ; Nelson, B.J.
Author_Institution :
ETH Zurich, Zurich
Abstract :
A novel linear-to-rotary motion converter is demonstrated with three-dimensional (3D) SiGe/Si dual- chirality helical nanobelts (DCHNBs). Analytical and experimental investigation shows that the motion conversion has excellent linearity for small deflections. The conversion ratio of displacement and load for a DCHNB is found to be 171.3 deg/mum and 2.110times10-6 Nldrm/N, respectively. The stiffness (0.033 N/m) is much smaller than that of bottom-up synthesized helical nanostructures, which is promising for high resolution force measurement. The ultra-compact size makes it possible for DCHNBs to serve as rotary stages for micro goniometers or rotary scanners for creating 3D scanning probe microscopes.
Keywords :
Ge-Si alloys; belts; force measurement; micromechanical devices; nanostructured materials; nanotechnology; 3D scanning probe microscopes; NEMS; SiGe-Si; bottom-up synthesized helical nanostructures; dual-chirality helical nanobelts; high resolution force measurement; linear-to-rotary motion converter; micro goniometers; motion conversion; nanoelectromechanical systems; rotary scanners; Actuators; Fabrication; Force measurement; Germanium silicon alloys; Intelligent robots; Intelligent systems; Motion analysis; Nanoelectromechanical systems; Semiconductor nanostructures; Silicon germanium;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443614