Low power, wide dynamic range carbon nanotube vacuum gauges

We present carbon nanotube vacuum gauges that operate at low power (nW-muW) and exhibit a wide- dynamic range (760 Torr - 10^-6 Torr). Pressure sensitivity was found to increase rapidly as the bias power was increased. In addition, by etching part of the thermal SiO₂ beneath the tubes and minimizing heat conduction through the substrate, pressure sensitivity was extended toward lower pressures. Results are compared to a conventional thin film meander resistor, which was fabricated and whose pressure response was also measured for comparative purposes.