A low-loss 1.8GHz monolithic thin-film piezoelectric-on-substrate filter

Author

Pan, Wanling ; Abdolvand, Reza ; Ayazi, Farrokh

Author_Institution

Georgia Inst. of Technol., Atlanta

fYear

2008

fDate

13-17 Jan. 2008

Firstpage

176

Lastpage

179

Abstract

A 1.8 GHz thin-film piezoelectric-on-substrate (TPoS) filter with insertion loss of less than 4 dB and bandwidth of 18 MHz (50Omega termination) is presented in this paper. Such filters are alternatives to conventional ladder-type filters working in the frequency range of up to a few GHz. A monolithic TPoS filter is a coupled mode system based on a single composite resonant structure, with a thin piezoelectric layer deposited on a high acoustic velocity, low loss substrate layer. An interdigitated top electrode structure is used that eliminates the spurious modes and provides a mechanism for adjusting the bandwidth.

Keywords

UHF filters; UHF integrated circuits; coupled mode analysis; crystal filters; integrated circuit design; losses; micromachining; monolithic integrated circuits; piezoelectric thin films; thin film circuits; bandwidth 18 MHz; bandwidth adjustment; coupled mode system; frequency 1.8 GHz; insertion loss; interdigitated top electrode structure; monolithic thin-film piezoelectric-on-substrate filter; single composite resonant structure; spurious mode elimination; Band pass filters; Bandwidth; Electric resistance; Electrodes; Frequency; Piezoelectric films; Resonance; Resonator filters; Shunt (electrical); Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Conference_Location

Tucson, AZ

ISSN

1084-6999

Print_ISBN

978-1-4244-1792-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2008.4443621

Filename

4443621