Gas and liquid phase sensing of volatile organics with disk microresonator

Author

Truax, S. ; Demirci, K.S. ; Seo, J.H. ; Kurzawski, P. ; Luzinova, Y. ; Hierlemann, A. ; Mizaikoff, B. ; Brand, O.

Author_Institution

Georgia Inst. of Technol., Atlanta

fYear

2008

fDate

13-17 Jan. 2008

Firstpage

220

Lastpage

223

Abstract

The sensing of volatile organic compounds (VOCs) using a MEMS resonator with an in-plane vibrational mode is reported. VOCs are detected in both the gas and liquid phases by a polymer-coated disk microresonator, which is operated as the frequency determining element in an amplifying feedback loop. The functionalized disk microresonators exhibit a short term frequency stability of 1.1 times 10^-7 in air and 3.4 times 10^-6 in water. Using polymer membranes as chemically sensitive layers, different concentrations of o-xylene, benzene, octane, trichloroethane, and toluene have been detected in the gas phase, with the limit of detection for o-xylene being 2.2 ppm. M-xylene has been detected in the liquid phase with a limit of detection of 1.9 ppm.

Keywords

frequency stability; gas sensors; micromechanical resonators; microsensors; organic compounds; MEMS resonator; amplifying feedback loop; frequency determining element; frequency stability; gas phase sensing; in-plane vibrational mode; liquid phase sensing; polymer membranes; polymer-coated disk microresonator; volatile organic compounds; Chemical elements; Feedback loop; Gas detectors; Microcavities; Micromechanical devices; Phase detection; Phase frequency detector; Polymers; Stability; Volatile organic compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Conference_Location

Tucson, AZ

ISSN

1084-6999

Print_ISBN

978-1-4244-1792-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2008.4443632

Filename

4443632