Title :
SU-8 micromachined WR-3 band waveguide bandpass filter with low insertion loss
Author :
Chen, Qian ; Shang, Xiaobing ; Tian, Yanjun ; Xu, Jie ; Lancaster, Michael J.
Author_Institution :
Sch. of Phys. Electron., Univ. of Electron. Sci. & Technol. of China, Cheng du, China
Abstract :
Presented is a WR-3 band (220-325 GHz) waveguide bandpass filter, which is constructed from three offset waveguide resonators operating at TE101 mode. This directly coupled resonator filter with Chebyshev response is designed to have a centre frequency of 300 GHz, a fractional bandwidth of 3.3% and a passband return loss of 20 dB. This filter is fabricated using thick SU-8 photoresist micromachining technique and has been tested. The measured average passband insertion loss is as low as around 0.4 dB. The measured return loss is better than 15 dB across the whole passband.
Keywords :
Chebyshev filters; band-pass filters; micromachining; millimetre wave filters; waveguide filters; Chebyshev response; SU-8 micromachined WR-3 band waveguide bandpass filter; SU-8 photoresist micromachining technique; TE<;sub>101<;/sub> mode; coupled resonator filter; frequency 220 GHz to 325 GHz; frequency 300 GHz; low insertion loss; noise figure 20 dB; off-set waveguide resonator; passband return loss;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2013.0277
