DocumentCode :
2917879
Title :
A study on ohmic contact of different metal contact materials on nanostructured Titanium Dioxide (TiO2) Thin Film
Author :
Musa, M.Z. ; Sarah, M.S.P. ; Shariffudin, S.S. ; Mamat, M.H. ; Rusop, M.
Author_Institution :
Solar Cell Lab., Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia
fYear :
2010
fDate :
11-14 April 2010
Firstpage :
412
Lastpage :
414
Abstract :
Three different type of materials i.e Au, Pt, and Pd have been investigated as metal contact on Titanium Dioxide (TiO2) thin films. These metal contacts have been deposited using sputter coating method. Meanwhile sol-gel spin coating method has been chosen to deposits TiO2 thin film. The ohmic contact characteristic of the three materials has been studied using Current-Voltage measurement.
Keywords :
gold; nanostructured materials; ohmic contacts; palladium; platinum; semiconductor thin films; sol-gel processing; spin coating; sputtered coatings; titanium compounds; Au; Pd; Pt; TiO2; current-voltage measurement; metal contact materials; nanostructured titanium dioxide thin film; ohmic contact; sol-gel spin coating; sputter coating; Coatings; Conductivity; Gold; Inorganic materials; Nanostructured materials; Ohmic contacts; Sputtering; Thin film devices; Titanium; Transistors; Characterization; Nanostructured; Ohmic contact; Work function;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Devices, Systems and Applications (ICEDSA), 2010 Intl Conf on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-6629-0
Type :
conf
DOI :
10.1109/ICEDSA.2010.5503028
Filename :
5503028
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2917879
بازگشت