DocumentCode :
2918276
Title :
Post-hydrophilic treatment free plastic biochip fabrication method using polyurea film
Author :
Shinohara, H. ; Takahashi, Y. ; Mizuno, J. ; Shoji, S.
Author_Institution :
Waseda Univ., Tokyo
fYear :
2008
fDate :
13-17 Jan. 2008
Firstpage :
367
Lastpage :
370
Abstract :
A novel low temperature bonding method was developed by using polyurea film as intermediate layers. A microchip having microchannel which has highly hydrophilic surface was realized by the pretreatment of VUV (vacuum ultraviolet) light irradiation. The bonding temperature was low enough to use thermo plastic channel plates such as PMMA (poly-methyl methacrylate) with negligible deformation of the channel structure. The results of contact angle measurements indicate that the highly hydrophilic surface of the microchannel was kept after the bonding process. For actual micro biochip fabrication, the post-hydrophilic treatment after bonding process can be skipped.
Keywords :
bonding processes; microchannel flow; organic compounds; ultraviolet radiation effects; free plastic biochip; intermediate layers; low temperature bonding; microchannel; microchip; poly-methyl methacrylate; polyurea film; post-hydrophilic treatment; thermo plastic channel plates; vacuum ultraviolet light irradiation; Bonding processes; Chemical technology; Chemical vapor deposition; Costs; Fabrication; Microchannel; Plasma temperature; Plastic films; Polymer films; Surface treatment;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
ISSN :
1084-6999
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2008.4443669
Filename :
4443669
Link To Document :
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