• DocumentCode
    2918291
  • Title

    Micro-machined micro ion source for flexible and concurrent process

  • Author

    Tamonoki, S. ; Kuwano, H. ; Nagasawa, S.

  • Author_Institution
    Tohoku Univ., Sendai
  • fYear
    2008
  • fDate
    13-17 Jan. 2008
  • Firstpage
    371
  • Lastpage
    374
  • Abstract
    In this paper a micro-machined micro ion source using B.K. (Barkhausen-Kurz) oscillation discharge to realize a high ion current is developed for flexible and concurrent MEMS processes. An ion beam with several muA from the micro ion source unit having phi1mmx4.37 mm discharge space was successfully generated.
  • Keywords
    micromachining; micromechanical devices; concurrent MEMS processes; microion source; micromachining; Anodes; Cathodes; Costs; Electrodes; Electrons; Fault location; Ion beams; Ion sources; Micromechanical devices; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
  • Conference_Location
    Tucson, AZ
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-1792-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2008.4443670
  • Filename
    4443670
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2918291