DocumentCode :
2918291
Title :
Micro-machined micro ion source for flexible and concurrent process
Author :
Tamonoki, S. ; Kuwano, H. ; Nagasawa, S.
Author_Institution :
Tohoku Univ., Sendai
fYear :
2008
fDate :
13-17 Jan. 2008
Firstpage :
371
Lastpage :
374
Abstract :
In this paper a micro-machined micro ion source using B.K. (Barkhausen-Kurz) oscillation discharge to realize a high ion current is developed for flexible and concurrent MEMS processes. An ion beam with several muA from the micro ion source unit having phi1mmx4.37 mm discharge space was successfully generated.
Keywords :
micromachining; micromechanical devices; concurrent MEMS processes; microion source; micromachining; Anodes; Cathodes; Costs; Electrodes; Electrons; Fault location; Ion beams; Ion sources; Micromechanical devices; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
ISSN :
1084-6999
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2008.4443670
Filename :
4443670
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2918291
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