Electronically steerable antenna array using PCB-based MEMS phase shifters

In this paper, MEMS phase shifters have been monolithically integrated with antennas on duroid substrate using printed circuit processing techniques. Specifically, 3-bit phase shifters have been integrated with a two-element folded slot antenna array for electronically scanned array (ESA) applications. As a proof-of-concept, a preliminary ESA prototype with beam steering of 4° at 10 GHz is presented. The proposed approach is suitable for fabrication of low cost, large area MEMS-based ESAs on Teflon or polyimide like low dielectric constant printed circuit board (PCB) substrates.