Inkjet printing of SU-8 for polymer-based MEMS a case study for microlenses

Author

Fakhfouri, V. ; Cantale, N. ; Mermoud, G. ; Kim, J.Y. ; Boiko, D. ; Charbon, E. ; Martinoli, A. ; Brugger, J.

Author_Institution

Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne

fYear

2008

fDate

13-17 Jan. 2008

Firstpage

407

Lastpage

410

Abstract

This paper describes a novel method to fabricate polymer MEMS based on the inkjet printing of SU-8, with a special emphasis on integrated micro-optical lens arrays. Inkjet control parameters are optimized in order to enable a stable and reproducible ejection of SU-8 drops in both continuous and drop-on-demand (DOD) modes. Arbitrary patterns of single and multiple polymer drops and arrays of convex microlenses are printed on different substrates. The influence of surface wetting properties on the size and the shape of the printed patterns is investigated. The optical properties of the microlenses are investigated in details. A model for inkjet printing of high-viscous functional materials for polymer MEMS has been used.

Keywords

micro-optomechanical devices; microlenses; optical fabrication; optical polymers; printing; SU-8; high-viscous functional material; inkjet printing; integrated microoptical lens array; microlens; polymer-based MEMS fabrication; Conducting materials; Lenses; Micromechanical devices; Microoptics; Optical materials; Polymers; Printing; Resists; US Department of Defense; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Conference_Location

Tucson, AZ

ISSN

1084-6999

Print_ISBN

978-1-4244-1792-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2008.4443679

Filename

4443679