DocumentCode
2918487
Title
An integrated MEMS ferrofluid pump using insulated metal substrate
Author
Mao, Leidong ; Koser, Hur
Author_Institution
Dept. of Electr. Eng., Yale Univ., New Haven, CT, USA
fYear
2005
fDate
6-10 Nov. 2005
Abstract
A novel ferrofluid micropump utilizing traveling magnetic fields is designed based on previous numerical analysis. A cost-effective fabrication process combining insulated metal substrate etching and soft lithography is used to realize the prototype ferrofluid micropump. Preliminary results show good agreement of pumping characteristics between theory and experiment.
Keywords
etching; magnetic fluids; micropumps; soft lithography; cost-effective fabrication process; insulated metal substrate etching; integrated MEMS ferrofluid micropump; numerical analysis; pumping characteristics; soft lithography; traveling magnetic field; Fabrication; Frequency; Insulation; Magnetic fields; Microfluidics; Micromechanical devices; Micropumps; Numerical analysis; Prototypes; Soft lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial Electronics Society, 2005. IECON 2005. 31st Annual Conference of IEEE
Print_ISBN
0-7803-9252-3
Type
conf
DOI
10.1109/IECON.2005.1569275
Filename
1569275
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