Title :
An integrated MEMS ferrofluid pump using insulated metal substrate
Author :
Mao, Leidong ; Koser, Hur
Author_Institution :
Dept. of Electr. Eng., Yale Univ., New Haven, CT, USA
Abstract :
A novel ferrofluid micropump utilizing traveling magnetic fields is designed based on previous numerical analysis. A cost-effective fabrication process combining insulated metal substrate etching and soft lithography is used to realize the prototype ferrofluid micropump. Preliminary results show good agreement of pumping characteristics between theory and experiment.
Keywords :
etching; magnetic fluids; micropumps; soft lithography; cost-effective fabrication process; insulated metal substrate etching; integrated MEMS ferrofluid micropump; numerical analysis; pumping characteristics; soft lithography; traveling magnetic field; Fabrication; Frequency; Insulation; Magnetic fields; Microfluidics; Micromechanical devices; Micropumps; Numerical analysis; Prototypes; Soft lithography;
Conference_Titel :
Industrial Electronics Society, 2005. IECON 2005. 31st Annual Conference of IEEE
Print_ISBN :
0-7803-9252-3
DOI :
10.1109/IECON.2005.1569275
