Title :
Linear tuning of the resonant frequency in tilting oscillators by an axially loaded suspension flexure
Author :
Shmilovich, T. ; Krylov, S.
Author_Institution :
Tel Aviv Univ., Tel Aviv
Abstract :
In this work we present a novel approach for fine linear tuning of resonant frequency in tilting oscillators and investigate, both theoretically and experimentally, the main features and functionality of the tuning mechanism. The operation principle of the tuning mechanism is based on the application of an axial force to a cantilever-like suspension flexure, built in such a way that the real pivot is replaced by a virtual one, which provides a center of rotation. The axial force is provided by an electrostatic transducer realized in the framework of the single layer multiple close-gap electrodes actuation concept. Devices with three different types of suspensions were fabricated and characterized. Experimental and theoretical results collectively show that the suggested approach can be efficiently implemented for resonant frequency tuning in tilting devices.
Keywords :
bending; circuit tuning; electrostatic devices; micromechanical devices; oscillators; transducers; axial force; axially loaded suspension flexure; cantilever-like suspension flexure; electrostatic transducer; linear tuning; micro oscillators; resonant frequency tuning; single layer multiple close-gap electrodes actuation concept; tilting oscillators; tuning mechanism; Electrodes; Electrostatic actuators; Fabrication; Laboratories; Oscillators; Resonance; Resonant frequency; Torque; Transducers; Tuning;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443742