Silicon nanowire coupled micro-resonators

This paper describes a microelectromechanical resonator interface to a nanomechanical structure. Our approach to microresonator-nanowire integration employs silicon nanowires as mechanical tuning elements, which perturb the frequency response of the resonator system. Two coupling configurations were designed and tested, the first with a nanowire beam coupled to the maximum displacement points of clamped-clamped microresonators and the second with a coupling beam attached 1.5 mum away from the anchors of the bending mode resonators. A focused-ion-beam (FIB) tool was used to tune the frequency response of the coupled systems. Finally a nanowire coupled bandpass filter with a 3 dB bandwidth about 120 kHz at 17.9 MHz was demonstrated.