DocumentCode :
2920021
Title :
Modeling and experimental study of nanoelectromechanical oscillator using single zinc oxide nanowire
Author :
Zhu, R. ; Wang, D.Q. ; Xiang, S.Q. ; Zhou, Z.Y. ; Ye, X.Y.
Author_Institution :
Tsinghua Univ., Beijing
fYear :
2008
fDate :
13-17 Jan. 2008
Firstpage :
746
Lastpage :
749
Abstract :
This paper reports a novel nanoelectromechanical oscillator using a single zinc oxide (ZnO) nanowire suspended across two micromachined Au electrodes. The oscillator is self-driven into a motion that is self-detected by using a field effect transistor (FET) configuration and a lock-in detection method. A continuum electromechanical model is established to realize a theoretical analysis on the oscillator and the primary experimental measurements are performed to validate the effectiveness of the device. Compared with other nanoelectromechanical oscillators, such as that with carbon nanotubes, the oscillator based on ZnO nanowire is provided with an enhanced electromechanical response and an observable resonance with a frequency on the order of tens of megahertz driven in an air environment. These merits significantly enhance the device´s practicability. The device can be potentially applied for actuators and sensors.
Keywords :
II-VI semiconductors; micromechanical resonators; nanowires; wide band gap semiconductors; zinc compounds; ZnO-Au; continuum electromechanical model; enhanced electromechanical response; field effect transistor; lock-in detection method; nanoelectromechanical oscillator; nanowire; self-driven oscillator; Carbon nanotubes; Electrodes; FETs; Gold; Motion detection; Oscillators; Performance analysis; Performance evaluation; Resonance; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
ISSN :
1084-6999
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2008.4443764
Filename :
4443764
Link To Document :
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