Title :
A large-aperture, piston-tip-tilt micromirror for optical phase array applications
Author :
Wu, L. ; Maley, S.B. ; Dooley, S.R. ; Nelson, T.R. ; McManamon, P.F. ; Xie, H.
Author_Institution :
Univ. of Florida, Gainesville
Abstract :
This paper reports the design, fabrication and characterization of a 4x4 micromirror array consisting of piston-tip-tilt electrothermal MEMS mirrors. Each mirror has an optical aperture size of 0.5x0.5 mm2. Both tip and tilt angles of over plusmn30deg are obtained at less than 5 Vdc, and the piston displacement reaches 215 mum at 4 Vdc. Two-dimensional scanning was demonstrated. Thermal analysis and transient response were also reported.
Keywords :
micro-optomechanical devices; microactuators; micromirrors; optical arrays; optical design techniques; optical fabrication; thermal analysis; lateral-shift-free large-vertical-displacement actuator; micromirror array design; optical aperture; optical phase array applications; piston displacement; piston-tip-tilt electrothermal MEMS mirrors; size 0.5 mm; thermal analysis; transient response; two-dimensional scanning; Apertures; Electrothermal effects; Micromechanical devices; Micromirrors; Mirrors; Optical arrays; Optical device fabrication; Phased arrays; Pistons; Transient analysis;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443766
