Title :
Three dimensional arrangement of sensors using development
Author :
Nakai, A. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution :
Univ. of Tokyo, Tokyo
Abstract :
This paper reports a simple method of making a three dimensional arrangement of MEMS sensors. In this method, a convex polyhedron is made up by folding the development which consists of structural plates and elastic hinges, and MEMS sensors are attached to its surfaces. The angle between two adjacent plates is determined geometrically by the dimensions of structures and only gravity is used to fold the development. We designed and fabricated the half structure of a truncated icosahedron which is well-known as a soccer-ball-shape, and attached 3-axis tactile sensors to all of its surfaces. The diameter of fabricated structure was 12 mm.
Keywords :
microsensors; tactile sensors; MEMS sensors; convex polyhedron; elastic hinges; size 12 mm; soccer-ball-shape; structural plates; three dimensional arrangement; three-axis tactile sensors; truncated icosahedron; Chromium; Fasteners; Gold; Gravity; Micromechanical devices; Robot sensing systems; Sputter etching; Structural plates; Tactile sensors; Wiring;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443785