DocumentCode
2920443
Title
Three dimensional arrangement of sensors using development
Author
Nakai, A. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution
Univ. of Tokyo, Tokyo
fYear
2008
fDate
13-17 Jan. 2008
Firstpage
832
Lastpage
835
Abstract
This paper reports a simple method of making a three dimensional arrangement of MEMS sensors. In this method, a convex polyhedron is made up by folding the development which consists of structural plates and elastic hinges, and MEMS sensors are attached to its surfaces. The angle between two adjacent plates is determined geometrically by the dimensions of structures and only gravity is used to fold the development. We designed and fabricated the half structure of a truncated icosahedron which is well-known as a soccer-ball-shape, and attached 3-axis tactile sensors to all of its surfaces. The diameter of fabricated structure was 12 mm.
Keywords
microsensors; tactile sensors; MEMS sensors; convex polyhedron; elastic hinges; size 12 mm; soccer-ball-shape; structural plates; three dimensional arrangement; three-axis tactile sensors; truncated icosahedron; Chromium; Fasteners; Gold; Gravity; Micromechanical devices; Robot sensing systems; Sputter etching; Structural plates; Tactile sensors; Wiring;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location
Tucson, AZ
ISSN
1084-6999
Print_ISBN
978-1-4244-1792-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2008.4443785
Filename
4443785
Link To Document