• DocumentCode
    2920443
  • Title

    Three dimensional arrangement of sensors using development

  • Author

    Nakai, A. ; Matsumoto, K. ; Shimoyama, I.

  • Author_Institution
    Univ. of Tokyo, Tokyo
  • fYear
    2008
  • fDate
    13-17 Jan. 2008
  • Firstpage
    832
  • Lastpage
    835
  • Abstract
    This paper reports a simple method of making a three dimensional arrangement of MEMS sensors. In this method, a convex polyhedron is made up by folding the development which consists of structural plates and elastic hinges, and MEMS sensors are attached to its surfaces. The angle between two adjacent plates is determined geometrically by the dimensions of structures and only gravity is used to fold the development. We designed and fabricated the half structure of a truncated icosahedron which is well-known as a soccer-ball-shape, and attached 3-axis tactile sensors to all of its surfaces. The diameter of fabricated structure was 12 mm.
  • Keywords
    microsensors; tactile sensors; MEMS sensors; convex polyhedron; elastic hinges; size 12 mm; soccer-ball-shape; structural plates; three dimensional arrangement; three-axis tactile sensors; truncated icosahedron; Chromium; Fasteners; Gold; Gravity; Micromechanical devices; Robot sensing systems; Sputter etching; Structural plates; Tactile sensors; Wiring;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
  • Conference_Location
    Tucson, AZ
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-1792-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2008.4443785
  • Filename
    4443785