Title :
Manipulation system for nano/micro components integration via transportation and self-assembly
Author :
Higuchi, Y. ; Kusakabe, T. ; Tanemura, T. ; Sugano, K. ; Tsuchiya, T. ; Tabata, O.
Author_Institution :
Kyoto Univ., Kyoto
Abstract :
We developed, for the first time, the manipulation system based on optoelectronic tweezers (OET) which manipulates multiple nano/micro components on an arbitrary substrate with concurrent observation of the component motion. From the theoretical analysis, the manipulation force of a hundred pN order is expected to act on components. It was successfully demonstrated to manipulate a PMMA particle of 10 mum diameter on a photoconductive film.
Keywords :
micromechanical devices; nanotechnology; optoelectronic devices; manipulation system; nano/micro components; optoelectronic tweezers; photoconductive film; self-assembly; transportation; Assembly; Electrodes; Indium tin oxide; Micromechanical devices; Photoconductivity; Self-assembly; Substrates; Throughput; Transportation; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443786
