Title :
Inherently robust micro gyroscope actuated by parametric resonance
Author :
Oropeza-Ramos, Laura A. ; Burgner, Christopher B. ; Turner, Kimberly L.
Author_Institution :
Univ. of California, Santa Barbara
Abstract :
The sensitivity loss, commonly presented in micro gyroscopes based on harmonic oscillators [1], is overcome by using parametric resonance as an actuation mechanism. This operation has been analytically studied in IEEE- Sensors´05 [2] and preliminary dynamical characterization and experimental setup has been presented in IDETC/CIE- ASME´07 [3]. The device is fabricated using SOI process and in this paper we report complete rate table characterization including off-axis isolation, drift, hysteresis and noise of the micro gyroscope with an additional amplification stage.
Keywords :
gyroscopes; microactuators; microsensors; silicon-on-insulator; SOI process; Si; actuation mechanism; amplification stage; dynamical characterization; harmonic oscillators; parametric resonance; rate table characterization; robust micro gyroscope; sensitivity loss; Differential equations; Electrostatics; Fabrication; Frequency; Gyroscopes; Hysteresis; Nonlinear equations; Oscillators; Resonance; Robustness;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443795
