Title :
Highly sensitive micro coriolis mass flow sensor
Author :
Haneveld, J. ; Lammerink, T.S.J. ; Dijkstra, M. ; Droogendijk, H. ; de Boer, M.J. ; Wiegerink, R.J.
Author_Institution :
Univ. of Twente, Enschede
Abstract :
We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 mum diameter and 1.2 mum wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor.
Keywords :
flow sensors; micromachining; silicon compounds; Lorentz forces; microcoriolis mass flow sensor; micromachining; silicon nitride resonant tube; Biosensors; Chemical sensors; Fluid flow; Fluid flow measurement; Force sensors; Magnetic sensors; Resonance; Shape; Silicon; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443807
