• DocumentCode
    2920796
  • Title

    2D Photonic Crystal Structures Fabricated by Nanosphere Lithography

  • Author

    Hao, Zhibiao ; Han, Shuo ; Wang, Jian ; Luo, Yi

  • Author_Institution
    State Key Laboratory on Integrated Optoelectronics, Department of Electronic Engineering, Tsinghua University, P.R. China; zbhao@tsinghua.edu.cn
  • fYear
    2005
  • fDate
    30-02 Aug. 2005
  • Firstpage
    235
  • Lastpage
    236
  • Abstract
    Two-dimensional photonic crystal (PC) structures have been successfully fabricated by a substrate-independent nanosphere lithography method. The air-filling factors of the PC patterns can be accurately controlled by thinning the polymer nanospheres using O2plasma.
  • Keywords
    nanosphere lithography; photonic crystal; self-assembly; Dielectric substrates; Etching; Gallium arsenide; Lithography; Nanostructures; Photonic crystals; Plasma applications; Plasma sources; Polymers; Self-assembly; nanosphere lithography; photonic crystal; self-assembly;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
  • Print_ISBN
    0-7803-9242-6
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2005.1569407
  • Filename
    1569407
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2920796