Title :
Thermodynamic analysis of a novel thermoelectric microdroplet sensor
Author :
Ni, J. ; Benecke, W. ; Lang, W.
Author_Institution :
Univ. of Bremen, Bremen
Abstract :
Instead of directly gauging microdrop size with expensive facilities, one can resort to a new type of droplet sensor, the design, measurement principle, and testing of which are introduced in this paper. This sensor transfers the thermopile signal induced by temperature sway in the course of droplet impinging on a regionally warmed membrane. Based on general heat conduction equation and spherically symmetric droplet-vaporization model, the enthalpy change and phase transition of concerned microdrops are explored. Derivation of essential equations is demonstrated in detail, and the mathematical tractability of such quiescent case is confirmed by experiments. The measuring method is finally suggested in the conclusion.
Keywords :
drops; heat conduction; membranes; microsensors; phase transformations; size measurement; thermodynamics; thermopiles; direct gauging method; enthalpy change; heat conduction equation; measurement principle; microdrop size measurement; phase transition; sensor testing; silicon nitride membrane; spherically symmetric droplet-vaporization model; thermodynamic analysis; thermoelectric microdroplet sensor design; thermopile signal transfer; Biomembranes; Fluid dynamics; Navier-Stokes equations; Sensor phenomena and characterization; Size measurement; Temperature sensors; Testing; Thermal sensors; Thermodynamics; Thermoelectricity;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443809