DocumentCode
2920822
Title
Thermodynamic analysis of a novel thermoelectric microdroplet sensor
Author
Ni, J. ; Benecke, W. ; Lang, W.
Author_Institution
Univ. of Bremen, Bremen
fYear
2008
fDate
13-17 Jan. 2008
Firstpage
928
Lastpage
931
Abstract
Instead of directly gauging microdrop size with expensive facilities, one can resort to a new type of droplet sensor, the design, measurement principle, and testing of which are introduced in this paper. This sensor transfers the thermopile signal induced by temperature sway in the course of droplet impinging on a regionally warmed membrane. Based on general heat conduction equation and spherically symmetric droplet-vaporization model, the enthalpy change and phase transition of concerned microdrops are explored. Derivation of essential equations is demonstrated in detail, and the mathematical tractability of such quiescent case is confirmed by experiments. The measuring method is finally suggested in the conclusion.
Keywords
drops; heat conduction; membranes; microsensors; phase transformations; size measurement; thermodynamics; thermopiles; direct gauging method; enthalpy change; heat conduction equation; measurement principle; microdrop size measurement; phase transition; sensor testing; silicon nitride membrane; spherically symmetric droplet-vaporization model; thermodynamic analysis; thermoelectric microdroplet sensor design; thermopile signal transfer; Biomembranes; Fluid dynamics; Navier-Stokes equations; Sensor phenomena and characterization; Size measurement; Temperature sensors; Testing; Thermal sensors; Thermodynamics; Thermoelectricity;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location
Tucson, AZ
ISSN
1084-6999
Print_ISBN
978-1-4244-1792-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2008.4443809
Filename
4443809
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