• DocumentCode
    2920822
  • Title

    Thermodynamic analysis of a novel thermoelectric microdroplet sensor

  • Author

    Ni, J. ; Benecke, W. ; Lang, W.

  • Author_Institution
    Univ. of Bremen, Bremen
  • fYear
    2008
  • fDate
    13-17 Jan. 2008
  • Firstpage
    928
  • Lastpage
    931
  • Abstract
    Instead of directly gauging microdrop size with expensive facilities, one can resort to a new type of droplet sensor, the design, measurement principle, and testing of which are introduced in this paper. This sensor transfers the thermopile signal induced by temperature sway in the course of droplet impinging on a regionally warmed membrane. Based on general heat conduction equation and spherically symmetric droplet-vaporization model, the enthalpy change and phase transition of concerned microdrops are explored. Derivation of essential equations is demonstrated in detail, and the mathematical tractability of such quiescent case is confirmed by experiments. The measuring method is finally suggested in the conclusion.
  • Keywords
    drops; heat conduction; membranes; microsensors; phase transformations; size measurement; thermodynamics; thermopiles; direct gauging method; enthalpy change; heat conduction equation; measurement principle; microdrop size measurement; phase transition; sensor testing; silicon nitride membrane; spherically symmetric droplet-vaporization model; thermodynamic analysis; thermoelectric microdroplet sensor design; thermopile signal transfer; Biomembranes; Fluid dynamics; Navier-Stokes equations; Sensor phenomena and characterization; Size measurement; Temperature sensors; Testing; Thermal sensors; Thermodynamics; Thermoelectricity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
  • Conference_Location
    Tucson, AZ
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-1792-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2008.4443809
  • Filename
    4443809