• DocumentCode
    2920830
  • Title

    Direct Fabrication of 2D Glass Photonic Crystals by Nanoimprint Lithography

  • Author

    Ishihara, Kuniaki ; Fujita, Masayuki ; Matsubara, Ippei ; Asano, Takashi ; Noda, Susumu

  • Author_Institution
    Kyoto University, Japan; ishihara@qoe.kuee.kyoto-u.ac.jp
  • fYear
    2005
  • fDate
    30-02 Aug. 2005
  • Firstpage
    239
  • Lastpage
    240
  • Abstract
    Nanoimprint lithography is attracting much attention for the development of large-scale photonic nanostructures. We demonstrate here a successful fabrication of two-dimensional photonic crystals with a period of 300 nm on a glass substrate at 360°C by using direct nanoimprint lithography.
  • Keywords
    Diffraction; Fabrication; Glass; Large-scale systems; Nanolithography; Nanostructures; Organic light emitting diodes; Personal communication networks; Photonic crystals; Plasma temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
  • Print_ISBN
    0-7803-9242-6
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2005.1569409
  • Filename
    1569409
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2920830