The magnetic calibration and optimization of symmetric hall plates may be accomplished even in the absence of a magnetic field

This paper presents a method to calibrate symmetric Hall plates with four terminals without the need for applying a magnetic field. We show that magnetic sensitivity parameters can be extracted from two independent resistance measurements in the absence of a perpendicular magnetic field B_perp. As a consequence, for known Hall mobility mu_H the optimization of symmetric Hall sensors is reduced to electrical conduction problems at B_perp = 0, thus avoiding finite-element simulations including magnetic effects. The results are obtained using the method of conformal mapping. They were verified using finite-element analysis. Experimental results from CMOS sensors are in excellent agreement with the theoretical predictions.