Design for reliability of MEMS/MOEMS for lightwave telecommunications

Author

Shea, Herbert R. ; Arney, Susanne ; Gasparyan, Arman ; Haueis, Martin ; Aksyuk, Vladimir A. ; Bolle, Cristian A. ; Frahm, Robert E. ; Goyal, Suresh ; Pardo, Flavio ; Simon, Maria Elina

Author_Institution

Lucent Technol. Bell Labs., Murray Hill, NJ, USA

Volume

2

fYear

2002

fDate

10-14 Nov. 2002

Firstpage

418

Abstract

The influences of materials systems, processing subtleties, and reliability requirements on the design, flexibility, functionality and commercialization of MOEMS are complex. A tight interdependent feedback loop between component/subsystem/system design, fabrication, packaging, manufacturing and reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating commercialization.

Keywords

failure analysis; micro-optics; micromechanical devices; optical communication equipment; semiconductor device reliability; MEMS/MOEMS; commercialization; component design; design for reliability; fabrication; failure modes; flexibility; functionality; interdependent feedback loop; lightwave telecommunications; manufacturing; materials systems; packaging; reliability requirements; subsystem design; system design; Failure analysis; Microelectromechanical devices; Micromechanical devices; Optical attenuators; Optical device fabrication; Optical devices; Optical feedback; Optical fiber networks; Optical modulation; Packaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE

ISSN

1092-8081

Print_ISBN

0-7803-7500-9

Type

conf

DOI

10.1109/LEOS.2002.1159357

Filename

1159357