• DocumentCode
    2921004
  • Title

    Solidly mounted resonators under high power study for reliability assessment

  • Author

    Ben Hassine, N. ; Mercier, Denis ; Renaux, Philippe

  • Author_Institution
    STMicroelectronics, Crolles, France
  • fYear
    2009
  • fDate
    12-17 July 2009
  • Firstpage
    248
  • Lastpage
    251
  • Abstract
    This work deals with BAW SMR reliability at high power levels. Experimental methods easy to set up in common RF laboratories are presented and validated. Experimental results concerning frequency shifts versus the dissipated power and the harmonics generation are reported. The main origins of these effects are discussed physically and conclusions in light of the obtained results about the characterization method and the device reliability are drawn.
  • Keywords
    bulk acoustic wave devices; resonators; semiconductor device reliability; BAW; high power resonator; reliability assessment; solidly mounted resonators; Acoustic waves; Electrodes; Film bulk acoustic resonators; Impedance; Microwave technology; Optical films; Radio frequency; Resonance; Substrates; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Research in Microelectronics and Electronics, 2009. PRIME 2009. Ph.D.
  • Conference_Location
    Cork
  • Print_ISBN
    978-1-4244-3733-7
  • Electronic_ISBN
    978-1-4244-3734-4
  • Type

    conf

  • DOI
    10.1109/RME.2009.5201318
  • Filename
    5201318