DocumentCode
2921004
Title
Solidly mounted resonators under high power study for reliability assessment
Author
Ben Hassine, N. ; Mercier, Denis ; Renaux, Philippe
Author_Institution
STMicroelectronics, Crolles, France
fYear
2009
fDate
12-17 July 2009
Firstpage
248
Lastpage
251
Abstract
This work deals with BAW SMR reliability at high power levels. Experimental methods easy to set up in common RF laboratories are presented and validated. Experimental results concerning frequency shifts versus the dissipated power and the harmonics generation are reported. The main origins of these effects are discussed physically and conclusions in light of the obtained results about the characterization method and the device reliability are drawn.
Keywords
bulk acoustic wave devices; resonators; semiconductor device reliability; BAW; high power resonator; reliability assessment; solidly mounted resonators; Acoustic waves; Electrodes; Film bulk acoustic resonators; Impedance; Microwave technology; Optical films; Radio frequency; Resonance; Substrates; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Research in Microelectronics and Electronics, 2009. PRIME 2009. Ph.D.
Conference_Location
Cork
Print_ISBN
978-1-4244-3733-7
Electronic_ISBN
978-1-4244-3734-4
Type
conf
DOI
10.1109/RME.2009.5201318
Filename
5201318
Link To Document