Properties of SAW resonators fabricated on quartz substrates of various qualities

Author

Greer, J.A. ; Parker, T.E. ; Montress, G.K.

Volume

1

fYear

1994

fDate

Oct. 31 1994-Nov. 3 1994

Firstpage

31

Abstract

The electrical properties of etched-groove Surface Acoustic Wave (SAW) resonators have been evaluated as functions of the SAW substrate´s quartz quality and surface polish. Electrical properties tested include the as-fabricated un-sealed resonant frequency, sealing-induced frequency shift, insertion loss, residual phase noise, turnover temperature, and long-term frequency stability. The results indicate that quartz quality and surface polish can play roles in the as-fabricated resonators´ electrical properties, specifically frequency, insertion loss, and quality factors, as well as the sealing-induced frequency shifts. However, electrical properties of SAW devices such as phase noise and long-term frequency stability do not appear to be strongly influenced by either the surface polish or the quality of the quartz substrate

Keywords

Q-factor; frequency stability; losses; phase noise; quartz; surface acoustic wave resonators; surface topography; SAW resonators; SiO₂; electrical properties; etched-groove resonators; insertion loss; long-term frequency stability; quality factor; quartz quality; quartz substrates; residual phase noise; resonant frequency; sealing-induced frequency shift; surface acoustic wave resonators; surface polish; turnover temperature; Frequency stability; Losses; Phase noise; Quartz materials/devices; Surface acoustic wave resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE

Conference_Location

Cannes, France

Print_ISBN

0-7803-2012-3

Type

conf

DOI

10.1109/ULTSYM.1994.401548

Filename

401548