DocumentCode
2921060
Title
Parylene-HT-based electret rotor generator
Author
Lo, Hsi-wen ; Tai, Yu-Chong
Author_Institution
California Inst. of Technol., Pasadena
fYear
2008
fDate
13-17 Jan. 2008
Firstpage
984
Lastpage
987
Abstract
A new micro power generator with parylene HT electret rotor is made. This generator uses parylene HT as a new electret material with a much superior charge density compared to teflon and CYTOP. The highest surface potential observed is 204.58 V/mum, equivalent to a surface charge density of 3.69 mC/m2. The generator uses an electret rotor. The rotor is a piece of PEEK insulator block coated with a layer of corona-charged parylene HT. Both output electrodes are on the stator. The generator produces 17.98 muW with 80MOmega load at 50Hz and 7.77 muW with an 800MOmega load at 10Hz.
Keywords
corona; electrets; rotors; small electric machines; surface potential; PEEK insulator; corona-charged parylene HT electret rotor; frequency 10 Hz; frequency 50 Hz; micro power generator; power 17.98 muW; power 7.77 muW; surface charge density; surface potential; Annealing; Corona; Current measurement; Density measurement; Electrets; Power generation; Rotors; Surface charging; Temperature; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location
Tucson, AZ
ISSN
1084-6999
Print_ISBN
978-1-4244-1792-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2008.4443823
Filename
4443823
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