• DocumentCode
    2921060
  • Title

    Parylene-HT-based electret rotor generator

  • Author

    Lo, Hsi-wen ; Tai, Yu-Chong

  • Author_Institution
    California Inst. of Technol., Pasadena
  • fYear
    2008
  • fDate
    13-17 Jan. 2008
  • Firstpage
    984
  • Lastpage
    987
  • Abstract
    A new micro power generator with parylene HT electret rotor is made. This generator uses parylene HT as a new electret material with a much superior charge density compared to teflon and CYTOP. The highest surface potential observed is 204.58 V/mum, equivalent to a surface charge density of 3.69 mC/m2. The generator uses an electret rotor. The rotor is a piece of PEEK insulator block coated with a layer of corona-charged parylene HT. Both output electrodes are on the stator. The generator produces 17.98 muW with 80MOmega load at 50Hz and 7.77 muW with an 800MOmega load at 10Hz.
  • Keywords
    corona; electrets; rotors; small electric machines; surface potential; PEEK insulator; corona-charged parylene HT electret rotor; frequency 10 Hz; frequency 50 Hz; micro power generator; power 17.98 muW; power 7.77 muW; surface charge density; surface potential; Annealing; Corona; Current measurement; Density measurement; Electrets; Power generation; Rotors; Surface charging; Temperature; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
  • Conference_Location
    Tucson, AZ
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-1792-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2008.4443823
  • Filename
    4443823