A high frequency SAW device transducer structure using conventional manufacturing processes

This paper describes a multilevel, half-wavelength transducer structure for high frequency SAW device fabrication. This transducer configuration lacks internal reflections, has enhanced harmonic performance, and can be fabricated using only conventional SAW fabrication techniques. One version of the fabrication process presented here requires no critical alignment steps, and is inherently manufacturable. This paper describes the transducer structure, concentrating on the materials and fabrication techniques. Both theoretical and experimental results for this type of device are presented. Potential for application to high-frequency low-loss devices is discussed