DocumentCode :
292151
Title :
1.3 GHz DDL on the basis of narrow reflecting groove microrelief
Author :
Gulyaev, Yu.V. ; Grigorievski, V.I. ; Kmita, A.M. ; Krikunov, A.I. ; Sokolov, D.V.
Volume :
1
fYear :
1994
fDate :
Oct. 31 1994-Nov. 3 1994
Firstpage :
433
Abstract :
The results of an investigation concerning dispersive delay lines based on a SAW IDT with narrow gaps between electrodes (0.2-0.3 μm) and reflecting groove microrelief of the same width are reported. The fabrication technology is based on self consistent photolithography, which have been proposed recently for making SAW components of gigahertz frequency range. DDLs for signal expansion and compression with a center frequency of 1300 MHz, a frequency deviation of 150 MHz and impulse response duration of 2 μs were fabricated. Position weighting was applied to obtain a desired frequency response of down-chirp and up-chirp RACs. The investigations of DDL characteristics depending on submicron groove depth were carried out, and a method to compensate for technological deviations by means of variation in RAC configuration was used
Keywords :
acoustic microwave devices; chirp modulation; interdigital transducers; photolithography; pulse compression; surface acoustic wave delay lines; surface acoustic wave resonators; surface acoustic wave signal processing; surface acoustic wave transducers; transient response; ultrasonic delay lines; ultrasonic dispersion; ultrasonic transducer arrays; 0.2 to 0.3 mum; 1.3 GHz; 150 MHz; 2 mus; SAW IDT; dispersive delay lines; down-chirp RACs; fabrication technology; frequency deviation; impulse response duration; narrow reflecting groove microrelief; position weighting; self consistent photolithography; signal compression; signal expansion; submicron groove depth; up-chirp RACs; Chirp modulation; Interdigital transducers; Photolithography; Surface acoustic wave delay lines; Surface acoustic wave device fabrication; Surface acoustic wave pulse compression; Surface acoustic wave resonators; Surface acoustic wave transducers; UHF resonators;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
Type :
conf
DOI :
10.1109/ULTSYM.1994.401624
Filename :
401624
Link To Document :
بازگشت