• DocumentCode
    2921510
  • Title

    Interfacing methods for fluidically-assembled microcomponents

  • Author

    Tolley, M.T. ; Baisch, A. ; Krishnan, M. ; Erickson, D. ; Lipson, H.

  • Author_Institution
    Cornell Univ., New York
  • fYear
    2008
  • fDate
    13-17 Jan. 2008
  • Firstpage
    1073
  • Lastpage
    1076
  • Abstract
    Here we present the design and implementation of electrical and mechanical interfaces for fluidically-assembled planar MEMS. We discuss the design and fabrication of systems of passive mechanical latches to bond microcomponents together and of electrical layers capable of establishing electrical connections with each other. We evaluate the ability of components with these interfaces to bond together within a microfluidic channel and to establish electrical circuits when assembled. This work supports the development of a novel microassembly strategy that bridges the gap between bottom-up self-assembly and top-down direct-manipulation technique. The ultimate goal of this research is the development of MEMS devices capable of the on-demand self-assembly, repair, and reconfiguration.
  • Keywords
    microassembling; microchannel flow; self-assembly; MEMS devices; direct-manipulation technique; electrical circuits; electrical connections; electrical layers; fluidically-assembled microcomponents; microassembly strategy; microfluidic channel; passive mechanical latches; planar MEMS; self-assembly; Assembly; Bonding; Circuits; Fabrication; Fluidic microsystems; Latches; Microassembly; Microfluidics; Micromechanical devices; Self-assembly;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
  • Conference_Location
    Tucson, AZ
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-1792-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2008.4443845
  • Filename
    4443845