Integrable SAW sensor with identification facility

Author

Enderlein, J. ; Schönberg, J. ; Chilla, E. ; Fröhlich, H.J.

Volume

1

fYear

1994

fDate

Oct. 31 1994-Nov. 3 1994

Firstpage

491

Abstract

Sensor applications such as gas monitoring for environmental protection require wirelessly addressable sensors possessing a read out feasibility by a radio signal. We have developed a system concept for a fully integrable SAW sensor on GaAs which derives the advantage of monolithic integration of fast electronic circuits and highly sensitive SAW components on the same substrate. First we have realized the SAW delay line for mass detection and a SAW coder on GaAs. The electronic circuits were built as discrete components. A sensor output signal containing the address and the measuring value has been generated, transmitted as a spread spectrum signal by air, and received by correlation techniques

Keywords

gallium arsenide; gas sensors; interdigital transducers; monitoring; radiotelemetry; surface acoustic wave delay lines; surface acoustic wave sensors; GaAs; SAW coder; SAW delay line; correlation techniques; electronic circuits; environmental protection; gas monitoring; identification facility; integrable SAW sensor; mass detection; monolithic integration; radio signal readout; spread spectrum signal; wirelessly addressable sensors; Gallium materials/devices; Gas detectors; Interdigital transducers; Monitoring; Radio telemetry; Surface acoustic wave delay lines; Surface acoustic wave detectors;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE

Conference_Location

Cannes, France

Print_ISBN

0-7803-2012-3

Type

conf

DOI

10.1109/ULTSYM.1994.401635

Filename

401635